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Excimer UV equipment - List of Manufacturers, Suppliers, Companies and Products

Excimer UV equipment Product List

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Excimer UV System

Unique high-energy UV excimer laser! Utilizes the same technology as high-performance mobile displays.

With 50 years of experience in UV lasers and optical systems, our company is well-versed in the challenges of managing, shaping, and focusing excimer laser beams. Our long-lasting lasers, optics, and structures help mitigate risks, allowing for operation 24 hours a day, 365 days a year. We employ the same enabling technologies used in high-performance mobile displays. Additionally, we leverage vertical integration to design, manufacture, and assemble the entire system to meet stringent standards. **Features** - Vertical integration - Proven industrial tools - Options available for 193nm, 248nm, and 308nm systems, as well as custom 157 or 351nm options - Maximizing the use of our unique high-energy UV excimer lasers with a complete optical system configured for applications such as LTPS, LLO, LIFT, PLD, and LA-ICP-MS *For more details, please refer to the PDF document or feel free to contact us.*

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  • Laser Components

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Excimer UV device (handheld type)

Ultra-compact handheld excimer UV device Body weight: 3.8kg Dimensions: W320×D260×H180mm Demo unit available for loan

Ultra-compact handheld excimer UV device Main unit weight: 3.8 kg Dimensions: W320 × D260 × H180 mm Demo units available for loan 【In-house experimental machine specifications】 - Maximum experimentable size: 600 × 700 mm - Lamp intensity: 50–140 mW - Number of lamps: 5 - Stage transport speed: 0.5–5.8 m/min - Atmosphere utilities: N2, CDA, ambient air - Clean room: Class 10,000 - Measurable with contact angle meter 【Features】 - High intensity and uniformity due to high-intensity RF discharge method - Direct irradiation from the lamp tube surface without electrodes or quartz windows on the irradiation surface - Excimer lamps can be lit in a vacuum environment - Significant reduction in nitrogen usage due to unique slit holder - Intensity adjustment possible for each lamp - Effective lamp length: up to MAX G10 size 【Main applications】 - Surface modification cleaning of glass and films - Bonding of films, glass, resins, metals, etc. - HDD cleaning, modification, and lubrication oil curing - Resist removal and ashing

  • Coater

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